Performance characteristics: Ceramic crossbeam and spindle (insensitive to temperature), starting balance Z-axis. All axes (including the Y-axis) are equipped with a four sided pre loaded high-performance starting bearing passive anti vibration system. SPECTRUM 1000 can be equipped with U-STONE (optional), which extends the effective measurement range in the Z-axis direction by 200mm.

Measurement range: Xmm(in.)700(27.5) Ymm (in.)700(27.5) PH6/TP6600(23.6)

Uniaxial accuracy: Optical reflection grating resolution of 0.2um (0.000008in)